PUBLICATIONS

Dernière mise à jour : 09/03/2026
  • Dendooven, J., Devloo-Casier, K., Coati, A., Portale, G., Bras, W., Ludwig, K., Detavernier, C., IEEE "Synchrotron based in situ characterization during atomic layer deposition" Paper presented at the 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Guilin, China, 28-31/10/2014. (2014).