The CASSIOPEE MBE (Cx3)

Equipment

The CASSIOPEE MBE chamber is equipped for surface preparation and characterization, as well as for thin film deposition:
-3 keV ion gun (OCI IPS3-D)
-Cylindrical mirror analyzer for Auger spectroscopy (Staib ESA100)
-LEED (Omicron SpectaLEED)
-RHEED (VG LEG300)
-10 crucibles 3kW e-gun evaporator (Thermionics)
-Transferable electron bombardment evaporator (Omicron EFM3)
-Quartz microbalances (Inficon IC/5 controller)

Caption: The MBE chamber of the CASSIOPEE beamline

Sample holder

The MBE sample holder has three positions for the sample.
-Position 1 allows to heat the sample by electron bombardment up to 1000°C. It also allows to rotate the sample around its surface normal for RHEED measurements.
-In position 2, the sample can be cooled down to 80K by a liquid nitrogen circulation.
-Position 3 is for semi-conductors heating by direct current.

Caption: View inside the MBE chamber, with the three-position sample holder and a quartz microbalance on the right.